| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of certainly driving a contact mechanism even when it is small. SOLUTION: In a housing of the pressure sensor 1, a pressure chamber 2C into which a pressure medium can flow and a driving chamber 5A and a detecting chamber 3A partitioned by a diaphragm 4 with respect to the pressure chamber are provided. The detecting chamber is provided with the contact mechanism formed of a movable contact 11 fixed to an elastic plate 10 and a fixed contact 13. The diaphragm 4 is made of metal film of Ni-Ti alloy, and displacement of the diaphragm is transmitted to the elastic plate 10 via a driving shaft 8. Since the diaphragm 4 is made of Ni-Ti alloy, namely super-elastic alloy, the diaphragm hardly causes plastic deformation differently from a conventional metal diaphragm. Therefore, large displacement can be applied even when the diaphragm is miniaturized, and the contact mechanism can be certainly driven even when it is small. COPYRIGHT: (C)2004,JPO
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