发明名称 |
DEVICE FOR TRANSFERRING A PATTERN TO AN OBJECT |
摘要 |
<p>A device (4) for transferring a pattern to an object (2). The invention relates especially to production of micro and nanostructures. The device comprises an alignment means (10) arranged in connection with a first contacting means (7) for controlling the motion of the first stamp (8) in a direction perpendicular to the pressing direction (A), and a second contacting means (11) having a second stamp (12) adapted to imprint a second pattern in the second surface (6) of the object (2), and a pressing means (9) further adapted to press the second stamp (12) into contact with the second surface (6) of the object (2) in the pressing direction (A). Hereby is obtained a device of a simple design, which has a high accuracy of the alignment of the stamps in relation to the object.</p> |
申请公布号 |
WO2004021083(A1) |
申请公布日期 |
2004.03.11 |
申请号 |
WO2003SE01245 |
申请日期 |
2003.07.31 |
申请人 |
OBDUCAT AB;OLSSON, LENNART;ANDERSSON, PETER |
发明人 |
OLSSON, LENNART;ANDERSSON, PETER |
分类号 |
B81C99/00;G03F7/00;G11B5/855;H01L21/027;(IPC1-7):G03F7/00;G03F9/00 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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