| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor having little variation in sensor output even in the case of temperature changes. SOLUTION: Both a heater for detecting pressure and a heater for reference are formed in a substrate. In the substrate, one or a plurality of grooves or a plurality of hole rows, in which parts of the back surface of the substrate are removed, are formed on both sides of an axis connecting the centers of the heaters and in regions approximately in parallel with the center axis. COPYRIGHT: (C)2004,JPO
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