| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power unit for plasma generation which is highly efficient and can protect a switch element from transient load ripple peculiar to plasma load. <P>SOLUTION: An amplifier circuit 20 has four bridge-connected semiconductor switches (MOS-FET) which constitute a D-class amplifier circuit and also function as a full bridge inverter. Then, it converts DC power supplied from a variable DC power source 10 into AC power. Moreover, a load impedance converting circuit 30 has, for example, a coil and a capacitor, and it puts a plasma generator 2 being the load of a power source 1 for plasma in "delay load" when viewed from the amplifier circuit 20. <P>COPYRIGHT: (C)2004,JPO |
