ALIGNER EVALUATION SYSTEM, ALIGNER EVALUATION METHOD, ALIGNER EVALUATION PROGRAM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an aligner evaluation system for use in product development by promptly and easily determining if a plurality of aligners constitute a group of devices worth development. SOLUTION: The aligner evaluation system has an optical system error data computation means 10a for computing data about differences between optical systems of the plurality of the aligners, a simulation means 10b for simulating a device pattern to be drawn for each of the aligners based on the computed data about optical differences, and an device evaluation means 10c for evaluating each of the aligners based on the simulated device patterns and for determining if the aligners may constitute a group of products worth development. COPYRIGHT: (C)2004,JPO