| 发明名称 |
GAS TUBE END CAP FOR A MICROWAVE PLASMA GENERATOR |
| 摘要 |
<p>A plasma generator (10) is provided with a plasma tube (16) extending between a gas source and a process chamber, an end cap (80) at one end of the plasma tube, and a seal (40, 42) extending around the plasma tube between the plasma tube and the end cap. The end cap includes a protrusion (84) that extends into the plasma tube.</p> |
| 申请公布号 |
WO2004021392(A1) |
申请公布日期 |
2004.03.11 |
| 申请号 |
WO2003US27395 |
申请日期 |
2003.08.29 |
| 申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
WANG, ALBERT |
| 分类号 |
H05H1/46;C23C16/00;H01J37/32;H01J49/10;H01L21/3065;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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