发明名称 METHOD FOR ASSEMBLY OF COMPLEMENTARY-SHAPED RECEPTACLE SITE AND DEVICE MICROSTRUCTURES
摘要 A method for assembly including the steps of: (a) providing a plurality of microstructure components with each of the components having a bottom with the same three dimensional shape; (b) forming a mold with at least one protuberance from a surface thereof so that the at least one protuberance (29) from a surface thereof so that the at least one protuberance has the same shape; (c) molding a moldable substrate (33) with the mold (34) to form a molded substrate having a surface with at least one recess (30) having the same shape; and (d) positioning a first of the plurality of microstructure components into said at least one recess. Each of the microstructure components may be formed by a masking and etching process, with the mold being formed by the same masking and etching process. The positioning step may consist of mixing the microstructure components with a fluid to form a slurry; and depositing the slurry on the surface of the molded substrate to cause the first of the plurality of microstructure components to self-align in the recess.
申请公布号 WO03030245(A3) 申请公布日期 2004.03.11
申请号 WO2002US29823 申请日期 2002.09.20
申请人 HRL LABORATORIES, LLC;BREWER, PETER, D.;HUNTER, ANDREW, T.;DECKARD, LUISA, M. 发明人 BREWER, PETER, D.;HUNTER, ANDREW, T.;DECKARD, LUISA, M.
分类号 H01L21/58;H01L21/98;H01L23/13;H01L25/065;H01L29/06 主分类号 H01L21/58
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