摘要 |
PROBLEM TO BE SOLVED: To provide a light receiving element in which a crystal defect in a light absorbing layer can be reduced and to provide a manufacturing method of the element. SOLUTION: The light receiving element is provided with a substrate 11 formed of a first semiconductor material, a seed layer 13 formed of a second semiconductor material different from the first semiconductor material formed on the substrate 11, a mask 14 which is arranged on the substrate 11 and has an opening 14a from which the seed layer 13 is exposed, and the light absorbing layer 15 formed of the second semiconductor material where the seed layer 13 is crystal-grown on the mask 14. The light absorbing layer 15 above the mask 14 is set to be a light receiving part 15a. COPYRIGHT: (C)2004,JPO
|