| 摘要 |
PROBLEM TO BE SOLVED: To achieve high precision exposure by enhancing the positional controllability of a stage. SOLUTION: A stage WST is driven by a linear motor 36X, in the direction of an X axis, along a guide member 42. At this point, compressed air is jetted against facing guide faces 62a and 62b from air bearings 52A and 52B provided in the stage, and a given clearance is formed between the guide face and the stage by the static pressure of the pressurized air. Moreover, a rigidity center LL of a guide member and the pressure-receiving centers (PA and PB) of the guide face coincide with each other, with respect to the direction of gravity. Therefore, by the action of the static pressure of the pressurized air, the guide face keeps its parallelism, without tilting to the opposite bearing face. In this case, since the parallelism is kept, even if the rigidity of the air bearing is enhanced, it scarcely causes unforeseen yawing, uncontrollable yawing, or pitching (or rolling), etc. in the stage. COPYRIGHT: (C)2004,JPO |
