| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical system for aligner which enables flexible contact between the device and a frame member without being restricted by the direction, i.e. upward, sideways or the like, of fixing a luminous light emitting port. SOLUTION: The illumination optical system for aligner is provided with a luminous light source (110), a reflector member (120) for reflecting the light from the luminous light source (110) for emission from the emission port (20), and the frame member (22) for supporting the reflector member (120). A notch (120c) is provided to an outer peripheral surface (120b) of the reflector member (120) so that the reflector member (120) is fit into the frame member (22) through the notch (120c) to complete mounting. COPYRIGHT: (C)2004,JPO |
