| 摘要 |
PURPOSE: A door closing system of semiconductor fabrication equipment is provided to reduce the inflow of particles and prevent the contamination due to the particles by using a controller to open or shut a door according to operating states of each unit. CONSTITUTION: A door closing system of semiconductor fabrication equipment includes a switching sensor(20a,20b), a door driving unit(22), and a controller. The switching sensor(20a,20b) is installed at one or both of an open part of a frame(16) for covering each unit(18) and a predetermined part of a door(14) corresponding to the open part of the frame(16) in order to sense an opening state of the door(14). The door driving part(22) is connected to the door and the frame in order to shut the door according to a control signal. The controller receives a signal from the switching sensor and controls a driving operation of the door driving unit.
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