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发明名称
Method and apparatus for thin film thickness mapping
摘要
申请公布号
AU2003265462(A8)
申请公布日期
2004.03.11
申请号
AU20030265462
申请日期
2003.08.15
申请人
INTERNATIONAL BUSINESS MACHINES CORP.;HYPERNEX, INC.
发明人
KRZYSZTOF J. KOZACZEK;DAVID S. KURTZ;PAUL R. MORAN;ROGER I. MARTIN;PATRICK W. DEHAVEN;KENNETH P. RODBELL;SANDRA G. MALHOTRA
分类号
G01B15/02;G01N23/20
主分类号
G01B15/02
代理机构
代理人
主权项
地址
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