发明名称 |
Semiconductor memory |
摘要 |
The semiconductor memory of this invention includes an MFMIS transistor including a field effect transistor (10) and a ferroelectric capacitor (20) formed above the field effect transistor. The semiconductor memory has a characteristic that a value of ( sigma - p) is substantially not changed with time in a relational expression, V = (d/ epsilon 0) x ( sigma -p), which holds among a potential difference V between an upper electrode and a lower electrode, a surface density of charge sigma of a ferroelectric film, polarization charge p of the ferroelectric film, a thickness d of the ferroelectric film and a dielectric constant epsilon 0 of vacuum when a data is written in the MFMIS transistor and the ferroelectric film is in a polarized state. <IMAGE> |
申请公布号 |
EP1164642(A3) |
申请公布日期 |
2004.03.10 |
申请号 |
EP20010114227 |
申请日期 |
2001.06.12 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SHIMADA, YASHUHIRO;KATO, YOSHIHISA |
分类号 |
H01L21/8247;H01L21/336;H01L21/8246;H01L27/105;H01L27/115;H01L29/51;H01L29/78;H01L29/788;H01L29/792;H01L51/05;(IPC1-7):H01L29/78 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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