发明名称 |
VACUUM COMPATIBLE LINEAR MOTION DEVICE |
摘要 |
<p>A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.</p> |
申请公布号 |
EP0883892(B1) |
申请公布日期 |
2004.03.10 |
申请号 |
EP19970953082 |
申请日期 |
1997.12.10 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
TROST, DAVID;VENEKLASEN, LEE |
分类号 |
F16C29/00;F16C29/02;F16C32/06;G03F7/20;H01J37/20;H01J37/305;H01L21/027;(IPC1-7):H01J37/20 |
主分类号 |
F16C29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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