发明名称 Infrared detecting device
摘要 An infrared detecting device possible to improve SN ratio, which is provided with a semiconductor substrate, a diaphragm set on the semiconductor substrate, a thermopile formed on the diaphragm by arranging a plurality of thermocouples composed of p-type polysilicon and n-type polysilicon in a row and electrically connecting them each other in series, and a heat absorption film formed on the central portion through an insulation layer, and sectional areas of the p-type and n-type polysilicons between hot and cold junctions of each of the thermocouples are made different from each other.
申请公布号 US6703554(B2) 申请公布日期 2004.03.09
申请号 US20010004824 申请日期 2001.12.07
申请人 IHI AEROSPACE CO., LTD. 发明人 MORITA SHINICHI;SHIBATA NAMI
分类号 G01J1/02;G01J5/02;G01J5/12;G01J5/14;H01L27/14;H01L35/32;(IPC1-7):H01L35/28;H01L31/058 主分类号 G01J1/02
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