摘要 |
An air-gap optical structure is fabricated by depositing a metallic spacer structure on a first transmissive optical element, and then contacting a second transmissive optical element to the spacer structure so that the spacer structure lies between the first transmissive optical element and the second transmissive optical element and defines an air gap therebetween. A first layer of the spacer structure contacts the first transmissive optical element, and a second layer of the spacer structure contacts the first layer. The first layer is preferably deposited by vapor deposition and is relatively thin, and the second layer is preferably electroless deposited and is relatively thick. The total thickness of the spacer structure is typically from about 5 to about 15 micrometers.
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