| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic head in which a magnetic head can efficiently be manufactured and moreover, the surface roughness of ABS (Alkyl Benzene Sulfonate) can be reduced enough. SOLUTION: A stacked part 2 including TMR (Tunneling Magnetoresistive) elements 6 for a plurality of magnetic heads is formed on a wafer 101 on which substrates 1 for a plurality of the magnetic heads are to be constituted (S1). Next, each bar (structure) 102 in which parts of the plurality of magnetic heads are arranged in the shape of one line is cut from the wafer 101 on which the stacked part 2 is formed by a diamond cutter, etc (S2). Then, a surface roughness reducing process for reducing the surface roughness of the surface of the side of the ABS of the bar 102 is performed. In this process, resin is applied to the surface of the side of the ABS of the bar 102 (S3) and the thickness of the resin is made thin with solvent (S4) and the bar 102 with the resin applied is etched from the side of the resin (S5). COPYRIGHT: (C)2004,JPO
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