| 摘要 |
A method for manufacturing a liquid crystal display including a pixel portion having a pixel TFT as well as a drive circuit portion having a N-type TFT and a P-type TFT is disclosed. Firstly, an un-doped silicon layer, an N-type silicon layer and a metal layer are sequentially formed over a substrate; then, the metal layer and the N-type silicon layer are patterned to define source and drain electrodes for the N-type TFT, source and drain electrodes for the pixel TFT and a bottom electrode of a storage capacitor; thereafter, a gate oxide layer and a gate metal layer are sequentially formed on the overall surface; subsequently, the gate metal layer and the gate oxide layer are patterned to form a gate electrode for the N-type TFT, a gate electrode for the P-type TFT and a power electrode as well as a gate electrode for the pixel TFT and the storage capacitor; afterwards, a first photo resist pattern which bares a predetermined region for the P-type TFT is formed on the surface over the substrate, and then p-type impurities are implanted to form source and drain electrodes for the P-type TFT; subsequently, after the first photo resist pattern is removed, an annealing treatment is carried out to activate the impurities; and finally, a passivation layer of photosensitive resin is formed and patterned to form contact holes; an ITO layer is then formed and patterned to form connections of the N-type TFT, the P-type TFT, the pixel TFT and the storage capacitor.
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