PROCESS FOR PRODUCING A PATTERNED OXIDE FILM ON A SUBSTRATE

摘要

A process for producing a patterned oxide film on a substrate by dissolving an oxide forming powder in a solvent that is photosensitive and/or to which a photosensitiser is added to form a photosensitive solution of the oxide forming powder, depositing the solution on a substrate and drying it to form a film, masking an area of the film and exposing an unmasked area to a light source such as ultraviolet light to reduce the solubility of the unmasked area in a suitable solvent whereby the masked area can be selectively dissolved to leave the unmasked area having a desired pattern, and heating the unmasked area to form an oxide film having the desired pattern.