发明名称 ACTIVE MATRIX DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an active matrix display device which is not likely to cause peeling of a conductive layer formed on a gate insulating film while using a top gate film transistor using a polycrystal semiconductor in a channel area, and to provide a method for manufacturing the display. <P>SOLUTION: In the active matrix display device provided with the top gate film transistor 20 provided with a channel area 14a consisting of the polycrystal semiconductor, the gate insulating film 15 of the transistor 20 is provided with a plurality of protrusion parts 18 at least on a part of a contacting face with a conductive layer 16 formed on it. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004071979(A) 申请公布日期 2004.03.04
申请号 JP20020231863 申请日期 2002.08.08
申请人 TOSHIBA CORP 发明人 GOTO YASUMASA
分类号 G02F1/1368;G09F9/30;H01L21/336;H01L29/786;(IPC1-7):H01L21/336;G02F1/136 主分类号 G02F1/1368
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