发明名称 |
Planarity diagnostic system, E.G., for microelectronic component test systems |
摘要 |
Maintaining proper planarity of elements of a microelectronic component test system helps ensure reliable operation of the test system. Aspects of the invention provide test systems and methods for verifying planarity of, for example, a head and a support surface of a microelectronic component test system. In one exemplary method, a probe card is mounted to and electrically coupled to a head of a microelectronic component test system. The probe card has an array of probes. A contact surface of the support is moved with respect to the head and a change in contact condition of each of the probes is recorded in a first data set. The orientation of the probe card with respect to the contact surface is changed, the contact surface is moved with respect to the head again and a change in contact condition of each of the probes is recorded in a second data set.
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申请公布号 |
US2004041556(A1) |
申请公布日期 |
2004.03.04 |
申请号 |
US20020230615 |
申请日期 |
2002.08.29 |
申请人 |
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发明人 |
MARTIN MICHAEL H.;CRUMP BRETT |
分类号 |
G01R1/073;(IPC1-7):G01R1/00 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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