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发明名称
METHOD FOR PRODUCING A SUSPENDED ELEMENT IN A MICRO-MACHINED STRUCTURE
摘要
申请公布号
EP0950172(B1)
申请公布日期
2004.03.03
申请号
EP19970953960
申请日期
1997.12.29
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
ROBERT, PHILIPPE;MICHEL, FRANCE;GRANGE, HUBERT
分类号
G01P9/00;B81C1/00;G01L9/00;G01P15/02;H01L29/84;(IPC1-7):G01L9/00
主分类号
G01P9/00
代理机构
代理人
主权项
地址
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