发明名称 |
PROCESS CHAMBER COMPONENTS HAVING TEXTURED INTERNAL SURFACES AND METHOD OF MANUFACTURE |
摘要 |
A component for a substrate processing chamber has a structure composed of aluminum oxide. The structure has a roughened surface having a roughness average of from about 150 to about 450 microinches. A plasma sprayed ceramic coating of aluminum oxide is deposited on the roughened surface of the structure. The component may be a dome shaped ceiling of the chamber. |
申请公布号 |
KR20040018366(A) |
申请公布日期 |
2004.03.03 |
申请号 |
KR20037014321 |
申请日期 |
2003.11.03 |
申请人 |
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发明人 |
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分类号 |
H01J37/32;H05H1/46;B01J19/08;C04B41/87;C23C16/44;C23F4/00;H01L21/3065;H05H1/32;H05H1/42 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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