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发明名称
PATTERNING METHOD
摘要
申请公布号
EP1392886(A2)
申请公布日期
2004.03.03
申请号
EP20020735584
申请日期
2002.05.23
申请人
QINETIQ LIMITED
发明人
FIXTER, GREGORY, PETER, WADE;JOHNSON, DANIEL, ROBERT;DAMERELL, WILLIAM, NORMAN;APPLETON, STEPHEN, GEORGE
分类号
C23C18/28;C23C18/00;C23C18/16;(IPC1-7):C23C18/16
主分类号
C23C18/28
代理机构
代理人
主权项
地址
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