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发明名称
Method of manufacturing a trench-gate semiconductor device
摘要
申请公布号
EP1393362(A2)
申请公布日期
2004.03.03
申请号
EP20020727822
申请日期
2002.04.25
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
PEAKE, STEVEN, T.;PETKOS, GEORGIOS;FARR, ROBERT, J.;ROGERS, CHRISTOPHER, M.;GROVER, RAYMOND, J.;FORBES, PETER
分类号
H01L21/336;H01L29/78;H01L21/331;H01L21/338;H01L29/08;H01L29/417;H01L29/423;(IPC1-7):H01L21/336
主分类号
H01L21/336
代理机构
代理人
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地址
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