| 摘要 |
Common internal electrodes and segment internal electrodes are laminated alternately with a piezoelectric material between and a common external electrode and a segment external electrode are provided on the surface, forming a drive vibrator. A free end part of the drive vibrator is formed with an active region and can be expanded and contracted in the length direction of the vibrator. A piezoelectric material of the outermost layer in the free end part can be operated based on the potential difference between the external and internal electrodes and a portion of the active region in the external electrode is used as a trimming portion with an effective length varied by trimming.
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