METHOD FOR SETTING BOAT POSITION IN VERTICAL TYPE FURNACE

摘要

PURPOSE: A method for setting a boat position in a vertical type furnace is provided to be capable of carrying out stable process by setting a predetermined position value for each boat. CONSTITUTION: A vertical furnace includes a pair of boats(107). At this time, each boat is transferred from a charge stage(109) to a process stage and from the process stage to a cooling stage. At the time, the boat is transferred to a predetermined position by using a boat transfer(108). Preferably, the predetermined position value is given for each boat, so that the boat is exactly transferred to the predetermined position of each stage according to the predetermined position value.