发明名称 SYSTEM AND METHOD OF KEEPING CHEMICALS
摘要 PURPOSE: A system and method of keeping chemicals are provided to prevent the delay of processes by automatically supplying chemicals as much as a predetermined volume. CONSTITUTION: A system of keeping chemicals is provided with a chemical container for storing chemicals, and a low temperature keeping part(100). At this time, the low temperature keeping part has an opening portion and a door(160) for switching the opening portion. The chemical keeping system further includes a drawer part(200) located at the predetermined portion of the low temperature keeping part for carrying the chemical container out and a transfer part for transferring the chemical container from the low temperature keeping part to the drawer part. Preferably, the transfer part includes at least one chemical container supporting part, a moving part, and a driving part for driving the moving part.
申请公布号 KR20040017865(A) 申请公布日期 2004.03.02
申请号 KR20020049786 申请日期 2002.08.22
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, GWANG HO
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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