| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for projecting a surface picture image with which a desired layer is stably brought into focus without vibrating the focus. SOLUTION: In a projecting device for a surface picture image with which a picture image of the entire surface of a plate-like object 1 is obtained by relatively moving projection means 21, 53 and 56, that project a part of the surface of the plate-like object, along the surface of the plate-like object and then uniting projected picture images at each position, surface-height detecting means 31-37 that measure height of a plurality of points of the surface of the plate-like object, a surface shape data storage means 39 that calculates a surface shape of the plate-like object based on the measured height of a plurality of points and stores it, a focusing means 10 that varies a focus condition of the projecting means on the surface of the plate-like object, and a focus control means 12 that controls the focusing means 10 correspondent to the surface shape of the plate-like object stored in the surface shape data storage means when the projecting means is relatively moved along the surface of the plate-like object, are provided. |
