| 摘要 |
PURPOSE: Provided is a receipt box for controller supplying cooling fluid equipped in a handler for testing semiconductor device to inhibit generation of frost in the controller providing the cooling fluid (liquefied nitrogen) and to easily observe pressure gauge or valves with eye. CONSTITUTION: The receipt box comprises a fluid supplying line(9) having branched pipes(8a,8b), a controller(7) for regulating supply of liquefied nitrogen from the branched pipes, an upper case(11) having inlet(13) and a lower case(12) to form inner space to receive compressed and dried air, outlet(14) of the lower case(12) and discharge hole(18) of a bottom cover(15) to exhaust the air in the inner space and the other dried air. In the receipt box, the upper case(11) and inside of the lower case(12) is entirely filled with the dried air after a determined time period and the compressed and dried air transfer heat to surface of the controller(7), the supplying line(9), and the branched pipes(8a,8b).
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