| 摘要 |
PURPOSE: A shaft-sealing structure of a vacuum pump is provided to increase the performance of a vacuum chamber for preventing the oil from leaking into a pump chamber. CONSTITUTION: A vacuum pump(11) for discharging gas by operating gas carriers(23¯32) in pump chambers(39¯43) through the rotation of rotary shafts(19,20) is composed of oil housing members(14,33), annular shaft seals(49,50), a second seal forming surface, and pumping devices(55,56). The oil housing member forms an oil region(331) adjacent to the pump chamber and a projection unit of the rotary shaft is protruded from the pump chamber to the oil region through the oil housing member. The annular shaft seal is positioned around the projection unit to rotate integrally together with the rotary shaft and formed with a first seal forming surface facing the oil housing member. The second seal forming surface is formed on the oil housing member with facing the first seal forming surface. The pumping device is arranged on the first seal forming surface to transfer the oil between the first and second seal forming surfaces from the pump chamber to the oil region in rotating the rotary shaft.
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