METHOD FOR REMOVING POLYSILANE FROM A SEMICONDUCTOR WITHOUT STRIPPING,申请号KR20037015627-传众专利搜索

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发明名称	METHOD FOR REMOVING POLYSILANE FROM A SEMICONDUCTOR WITHOUT STRIPPING
摘要
申请公布号	KR20040017813(A)	申请公布日期	2004.02.27
申请号	KR20037015627	申请日期	2003.11.28
申请人		发明人
分类号	H01L21/3065;H01L21/027;H01L21/033;H01L21/308;H01L21/311	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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