TRANSPARENT CONDUCTIVE FILM LAMINATE AND ITS FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film laminate having a desired electrical characteristic and a water vapor barrier property, and to provide a method for forming the film laminate. SOLUTION: The method forming at least one layer among a metallic compound layer or a transparent conductive layer of the transparent conductive film laminate having the metallic compound layer with a base material composed of at least either of an oxygen atom or a nitrogen atom and of a metal atom, forms a film on the base material by generating a plasma situation by introducing a mixture gas containing at least more than one kind of inert gas and at least more than one kind of reactive gas into discharge space and by exposing the base material to the reactive gas in the plasma situation. COPYRIGHT: (C)2004,JPO