摘要 |
A pressure measurement device (10) that has a digital clock circuit (22) that provides an excitation clock (24) and a control output (26). An integrator (30) includes a switch controlled (32) by the control output (26), an amplifier (34), and a pressure sensing capacitance (36) coupled in an amplifier feedback path. A switch (32) connects across the first pressure sensing capacitance (36). A reference capacitance (47) that is insensitive to the pressure couples between the excitation clock (24) and the amplifier (34) input. An amplifier output represents the pressure. |