| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a soft X-ray interferometor with high penetration efficiency, relatively inexpensive and easy to handle by using a transmission grating as a beam splitter. <P>SOLUTION: When an incident soft X-ray gets into the first transmission grating 1, an X-ray with a specific wavelength included in the incident soft X-ray is divided into two beams such as a beam 1 and a beam 2, each of which travels to an upper or a lower direction forming the same angle against an optical axis, and both of which have the same intensity. The beam 1 is reflected by an upper total reflection mirror 3. The beam 2 is reflected by an lower total reflection mirror 4, and then irradiates to a target phase object 7. Since the beam 1 and the beam 2 travel to the optical axis having the same angle as shown in the figure, the beams intersect each other at a point on the optical axis. Since the second transmission grating 2 has a function to separate the beam 1 and the beam 2 respectively, beams are superimposed and interference occurred. The interference pattern formed by the beam 1 and the beam 2 is detected and recorded by a 2-dimensional X-ray detector 5 in a subsequent stage. <P>COPYRIGHT: (C)2004,JPO</p> |
