| 摘要 |
A monolithic bubble ink jet print head and a fabrication method thereof. The print head includes a substrate having a resistance body to heat ink and an ink supply opening penetrating through the substrate, and a chamber/nozzle plate that is formed on the substrate by patterning a photo resist by a photolithography process using a single photo mask having at least two light transmission rates, so that a flow channel structure of an ink chamber, a restrictor, an ink supply channel and a nozzle are simultaneously formed. The fabrication method includes providing a substrate having a resistance body formed on an upper surface thereof to heat ink, forming a photo resist on the substrate having the resistance body, exposing the photo resist to light by using a single photo mask having at least two light transmission rates, and developing the photo resist exposed to the light.
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