发明名称 |
Patterned granulized catalyst layer suitable for electron-emitting device, and associated fabrication method |
摘要 |
An electron-emitting device contains a vertical emitter electrode patterned into multiple laterally separated sections situated between the electron-emissive elements, on one hand, and a substrate, on the other hand. The electron-emissive elements comprising carbon nanotubes are grown at a temperature range of 200° C. to 600° C. compatible with the thermal stress of the underlying substrate. The electron-emissive elements are grown on a granulized catalyst layer that provides a large surface area for growing the electron-emissive elements at such low temperature ranges.
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申请公布号 |
US2004037972(A1) |
申请公布日期 |
2004.02.26 |
申请号 |
US20020226873 |
申请日期 |
2002.08.22 |
申请人 |
SIMON KANG;CRAIG BAE;JAE KIM JUNG |
发明人 |
SIMON KANG;CRAIG BAE;JAE KIM JUNG |
分类号 |
C23C16/02;C23C16/26;(IPC1-7):C23C16/26 |
主分类号 |
C23C16/02 |
代理机构 |
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代理人 |
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地址 |
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