| 发明名称 |
PROCESS FOR CONTROLLING THE HYDRAULIC CHAMBER PRESSURE OF A DIAPHRAGM PUMP |
| 摘要 |
A process and system for controlling the pressure of a hydraulic chamber on a diaphragm pump. Such process and system particularly adapted to alleviate vacuum conditions in the diaphragm dispense chamber. |
| 申请公布号 |
WO03024555(A3) |
申请公布日期 |
2004.02.26 |
| 申请号 |
WO2002US29542 |
申请日期 |
2002.09.18 |
| 申请人 |
MYKROLIS CORPORATION;TOMONORI, UMETSU |
发明人 |
TOMONORI, UMETSU |
| 分类号 |
F04B49/02 |
主分类号 |
F04B49/02 |
| 代理机构 |
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代理人 |
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