发明名称 Semiconductor storage device used as a DRAM device comprises a cell transistor structure with word lines having an n-diffusion layer with an n-carrier concentration which is higher on the region close to the word line of one cell
摘要 Semiconductor storage device comprises a cell transistor structure with word lines (2,3,4,5) having an n-diffusion layer (6, 7, 8) with an n-carrier concentration which is higher on the region close to the word line of one cell than on the region close to the word line of another cell. Independent claims are also included for: (a) alternative semiconductor storage devices; and (b) processes for the production of the semiconductor storage device.
申请公布号 DE10334101(A1) 申请公布日期 2004.02.26
申请号 DE20031034101 申请日期 2003.07.25
申请人 ELPIDA MEMORY, INC.;HITACHI ULSI SYSTEMS CO., LTD.;HITACHI, LTD. 发明人 OYU, KIYONORI;OGISHIMA, ATSUSHI;UCHIYAMA, HIROYUKI;KAWAKITA, KEIZO;SUZUKI, MASAHITO
分类号 H01L21/76;H01L21/265;H01L21/336;H01L21/762;H01L21/8234;H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L21/824 主分类号 H01L21/76
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