| 摘要 |
PROBLEM TO BE SOLVED: To avoid duplication of work when simultaneously and separately improving an inner surface and an outer surface of a hollow body, and simultaneously deposit a film of excellent adhesiveness on the inner surface and the outer surface of the hollow body. SOLUTION: A conductive hollow body 2 with at least one end thereof opened is installed in a raw material gas atmosphere for producing plasma in an evacuated state, and antennas 4 are installed inside and outside the hollow body 2 at a space for generating no discharge in an insulated state from the hollow body. Plasma is generated inside and outside the hollow body 2 by the high frequency discharge or micro-wave discharge, the negative high-voltage pulse to the grounding electric potential is applied to the hollow body 2, and ions in the plasma atmosphere are implanted in the inner surface and the outer surface of the hollow body 2. COPYRIGHT: (C)2004,JPO
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