MONOLITHIC BUBBLE INK JET PRINTER HEAD AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A monolithic bubble ink jet printer head and a method for manufacturing the same are provided to prevent uniformity between cells from being lowered by integrally forming a nozzle with a chamber using a photoresist. CONSTITUTION: A monolithic bubble ink jet printer head(100) includes a substrate(101), a first ink feeding path(102), and a chamber/nozzle plate(109). The substrate(101) is formed with a heater(106) for heating ink and a first protective layer(105) for protecting the heater(106). The first ink feeding path(102) forms an ink feeding passage passing through the substrate(101). The chamber/nozzle plate(109) is formed on the first protective layer(105) by pattering a photoresist(108) through a photolithography process. The first protective layer(105) formed on the heater(106) includes silicon nitride, or silicon carbide.