| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device reduced in size and easy in assembling for quickly and accurately positioning a small-sized element, a component and the like. <P>SOLUTION: A linear drive motor 4 is arranged at the lower side of a moving stage 1, the position of the moving state 1 is measured by a linear encoder 10 and fed back to a control device, and the positioning of the moving stage 1 is conducted by the linear drive motor 4. The linear motor 4 is constituted of a drive part 4a equipped with a cylindrical coil that generates a moving magnetic field, and a columnar shaft 4b linearly movable in the axial direction. A heat pipe 6 is arranged at the drive part 4a of the linear drive motor 4, and heat generated at the drive part 4a by the heat pipe 6 is dissipated to a heat dissipation part 7. A current value fed to the linear drive motor 4 may be controlled when a temperature, which is measured by a temperature sensor 11, becomes one under which a thermal influence is not negligible in the accuracy of prescribed positioning. <P>COPYRIGHT: (C)2004,JPO |
