CHAMBER DOOR SYSTEM FOR PREVENTING WAFER FROM BEING BROKEN IN SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A chamber door system for preventing a wafer from being broken in semiconductor fabricating equipment is provided to prevent the wafer caught in a chamber door from being broken when the door is shut by precisely detecting the position of the wafer when the wafer is loaded/unloaded into/from a process chamber and by connecting the operation of the door to a detected signal. CONSTITUTION: A sensor unit detects the position of the wafer loaded into the process chamber(10). The door which opens and shuts the chamber shuts the door after the sensor unit detects that the wafer is in a normal position.