发明名称 Method of manufacturing a semiconductor integrated circuit device having a memory cell array and a peripheral circuit region
摘要 In semiconductor integrated circuit device having a DRAM including a memory cell portion formed at a first portion of a main surface of a semiconductor substrate and a peripheral circuit portion formed at a second portion of the main surface of the semiconductor substrate, bit line conductors and first level interconnect conductors in the peripheral circuit portion for connecting the memory cell portion and the peripheral circuit portion so as to exchange signals between them are constituted by conductor layers that are formed simultaneously and hence, exist at the same level. The conductor layers exist at an outside position of the memory cell portion such as in the peripheral circuit portion, and the thickness of portions of the conductor layers constituting the first level interconnect conductors of the peripheral circuit portion is greater than the thickness of portions of the conductor layers constituting the bit line conductors. A position at which a transistor for selectively connecting the memory cell portion and the peripheral circuit portion is formed may be a boundary, or a position inside a boundary region between the memory cell portion and the peripheral circuit portion may be a boundary, where the thickness change is effected.
申请公布号 US6696337(B2) 申请公布日期 2004.02.24
申请号 US20020166013 申请日期 2002.06.11
申请人 HITACHI, LTD.;TEXAS INSTRUMENTS INC. 发明人 ASANO ISAMU;TSU ROBERT
分类号 H01L21/8242;H01L27/108;(IPC1-7):H01L21/824 主分类号 H01L21/8242
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