| 摘要 |
PURPOSE: A time based mass flow controller and a method for controlling a flow rate using the same are provided to measure and control correctly the volume flow and the mass flow of the incompressible fluid by using a period of time. CONSTITUTION: A time based mass flow controller includes one or more storage tanks(1), an inflow switch(13), an outflow switch(3), and a controller. Each volume of the storage tanks(1) is changed according to a predetermined period. The inflow switch(13) opens or closes an inlet of the storage tank. The outflow switch(3) opens or closes an outlet of the storage tank. The controller controls the inflow switch and the outflow switch to induce the incompressible fluid into the storage tanks. In addition, the controller controls the volume flow and the mass flow of the incompressible fluid by controlling the inflow switch(13) and the outflow switch(3).
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