METHOD AND APPARATUS FOR MANUFACTURING SILICA-TITANIA EXTREME ULTRAVIOLET ELEMENTS
摘要
Methods and apparatus for manufacturing titania-containing fused silica bodies are disclosed. The titania-containing fused silica bodies are subsequently processed to make extreme ultraviolet soft x-ray masks. The methods and apparatus involve providing powders external to a furnace cavity and depositing the powders in the furnace cavity to form a titania-containing fused silica body.
申请公布号
WO03076352(A3)
申请公布日期
2004.02.19
申请号
WO2003US06809
申请日期
2003.03.04
申请人
CORNING INCORPORATED
发明人
DAVIS, JR, CLAUDE L;BOWDEN, BRADLEY F;WIGHT, JR., JOHN F;WASILEWSKI, MICHAEL H;HRDINA, KENNETH E;BARRETT, W TIMOTHY;ROBINSON, MICHAEL