| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining device capable of keeping the spot diameter of a laser beam on an object to be measured constant even when the device is so built that the condenser lens of the laser beam is movable to make the setting space for the device small. <P>SOLUTION: When moving the condenser lens 4, which condenses the laser beam 2 on the surface of an object to be machined, in the directions of an X-axis and a Y-axis, which are parallel to the surface of an object 5 to be machined with a given distance, by an X-axis and a Y-axis control parts 11, 12, the spot diameter of the laser beam 2 is regulated to be roughly constant, The regulation is performed by moving the condenser 4 by a lens distance control part 15 according to the variation of the optical path of the laser beam 2 from a laser oscillator 1 to the condenser lens 4, or by adjusting the focal length of the condenser lens 4 by a focal length control part 16 according to the variation of the optical path length of the laser beam 2 from the laser oscillator 1 to the condenser lens 4. <P>COPYRIGHT: (C)2004,JPO</p> |
