| 发明名称 |
Method of detecting a substrate in a carrier head |
| 摘要 |
A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.
|
| 申请公布号 |
US2004033762(A1) |
申请公布日期 |
2004.02.19 |
| 申请号 |
US20030640127 |
申请日期 |
2003.08.12 |
| 申请人 |
APPLIED MATERIALS, INC., A DELAWARE CORPORATION |
发明人 |
CHEN HUNG CHIH;TSENG MING KUEI;ZUNIGA STEVEN |
| 分类号 |
B24B47/22;B24B49/00;B25J15/06;H01L21/304;H01L21/306;(IPC1-7):B24B49/00;B24B51/00 |
主分类号 |
B24B47/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
