BEAM DRAWING METHOD, MANUFACTURING METHOD OF MOTHER MOLD FOR MOLD FOR MOLDING OPTICAL ELEMENT, MOTHER MOLD, MOLD FOR MOLDING OPTICAL ELEMENT, AND OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a beam drawing method for performing accurate drawing without increasing a cost and without extending a manufacturing time, and to provide a manufacturing method of a mother mold for a metal mold molding an optical element, a mother mold, metal mold for molding an optical element, and the optical element.

SOLUTION: A boundary Bd between one drawing region R1 and another drawing region R2 is a joined part (a point where a change in the dosage of a beam is inverted) between the oblique face of a pattern P and the vertical face. Thus, for instance, when a final beam of R1 and an initial beam of R2 are overlapped to each other as a result of deviation of the beam position of R2 relative to R1, a dosage increases in the boundary, and a pattern shape is maintained as a whole since the right side oblique face in the pattern is only extended as shown by the dotted line P1'. When the optical element is finally molded by using a base material to be drawn, natural optical characteristics of the molded optical element can be displayed.

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