发明名称 |
INTERDIGITATED INTEGRATED CIRCUIT CAPACITOR |
摘要 |
<p>The invention relates to the field of microelectronics, more particularly to the structure and layout of integrated circuit capacitors. An integrated circuit capacitor is provided comprising: a first conductive component comprising a plurality of digital sub-components; and a second conductive component comprising a plurality of digital sub-components; wherein the digital sub-components of the first and second conductive components are interleaved and parallel, with a narrow uniform distance therebetween; and wherein the orientation of the interleaved digital sub-components is symmetrical about the center of the integrated circuit capacitor. This symmetrical orientation aids in the creation of a capacitor with well-matched top and bottom plates and capacitor pairs that have well-defined ratios. The arrangement serves to minimize the photolithographic variations by averaging the offsets caused by the different lithographic traces.</p> |
申请公布号 |
WO2004015777(A1) |
申请公布日期 |
2004.02.19 |
申请号 |
WO2003CA01203 |
申请日期 |
2003.08.11 |
申请人 |
ENQ SEMICONDUCTOR INC. |
发明人 |
DEVRIES, CHRISTOPHER, ANDREW;MASON, RALPH, DICKSON |
分类号 |
H01L27/08;(IPC1-7):H01L27/08 |
主分类号 |
H01L27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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