发明名称 INTERDIGITATED INTEGRATED CIRCUIT CAPACITOR
摘要 <p>The invention relates to the field of microelectronics, more particularly to the structure and layout of integrated circuit capacitors. An integrated circuit capacitor is provided comprising: a first conductive component comprising a plurality of digital sub-components; and a second conductive component comprising a plurality of digital sub-components; wherein the digital sub-components of the first and second conductive components are interleaved and parallel, with a narrow uniform distance therebetween; and wherein the orientation of the interleaved digital sub-components is symmetrical about the center of the integrated circuit capacitor. This symmetrical orientation aids in the creation of a capacitor with well-matched top and bottom plates and capacitor pairs that have well-defined ratios. The arrangement serves to minimize the photolithographic variations by averaging the offsets caused by the different lithographic traces.</p>
申请公布号 WO2004015777(A1) 申请公布日期 2004.02.19
申请号 WO2003CA01203 申请日期 2003.08.11
申请人 ENQ SEMICONDUCTOR INC. 发明人 DEVRIES, CHRISTOPHER, ANDREW;MASON, RALPH, DICKSON
分类号 H01L27/08;(IPC1-7):H01L27/08 主分类号 H01L27/08
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